Liquid crystal polymer optical filter carrier

ABSTRACT

An external cavity laser apparatus includes a wavelength tuning element mounted to a carrier on the apparatus&#39;s platform. Thermal control of the platform sets an initial position of the carrier and tuning element, from which independent tuning of the element can be achieved for wavelength tuning. The carrier is formed of a liquid crystal polymer that thermally isolates the tuning element from this platform, for such independent thermo-optical tuning. The liquid crystal polymer may match the coefficient of thermal expansion of the carrier to that of the platform. The support further includes embedded electrodes, either within or on the outer surface of the carrier, which can couple from the tuning element to the controller, where in some examples such coupling is direct and without use of additional electrical traces or wire bonds.

FIELD OF THE DISCLOSURE

Embodiments of the present disclosure relate generally to optoelectronicassemblies and, more particularly, to methods and apparatuses forsupporting an optical element of laser apparatus.

BACKGROUND OF RELATED ART

Fiberoptic telecommunications are continually subject to demands forincreased bandwidth. One way that bandwidth expansion has beenaccomplished is through dense wavelength division multiplexing (DWDM). ADWDM system is capable of simultaneously transmitting many different andseparate data streams on a single optical fiber. Each data streamrepresents a different channel on the optical fiber, where each channelexists at a different channel wavelength. The modulated output beam of alaser operating at the desired channel wavelength creates the datastream. Multiple lasers, each at a different wavelength, are used tocreate multiple data streams, whereafter the data streams are combinedonto a single fiber for transmission in their respective channels.

The International Telecommunications Union (ITU) presently requireschannel separations of approximately 0.4 nanometers, or about 50 GHz.This channel separation allows up to 128 channels to be carried by asingle fiber within the bandwidth range of currently available fibersand fiber amplifiers.

With the requirement for multiple tightly spaced channels, stablecontrol over the laser source's output frequency is important to systemeffectiveness. The lasers used in DWDM systems typically have been basedon distributed feedback (DFB) lasers operating with a referencewavelength tuning etalon in a feedback control loop, with the referenceetalon defining the ITU wavelength grid. Due to manufacturing as well asperformance limitations, DFB lasers are used as single channel lasers,or as lasers limited to tuning among a small number of adjacentchannels. As a result, DWDM applications require multiple different DFBlasers each at a different channel wavelength.

Continuously tunable external cavity lasers have been developed toovercome the limitations of DFB lasers. These lasers have a gain chipmedia and an end mirror that define an external cavity within whichwavelength tuning occurs, e.g., by thermal tuning operation. Tuning issomewhat difficult to achieve given the complexity of the tuningelement. The carriers used to retain the tuning elements are complexstructures, designed to provide sufficient thermal isolation. Tuningoperation may be effected by the carrier's thermal responsiveness, aswell as its structure and orientation. As a result, i complex carriershapes have been proposed, but even these shapes are still too complexto build.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a perspective view of a tunable laser apparatus witha wavelength selection device;

FIG. 2 illustrates a conventional support for a wavelength selectiondevice having two thermally tunable etalons;

FIG. 3 illustrates a support configuration for a wavelength selectiondevice showing embedded electrodes, in accordance with a presentexample;

FIG. 4 illustrates another support configuration for a wavelengthselection device with embedded electrodes that may directly couple to anactive tuning element;

FIGS. 5A and 5B illustrate another example support configuration for awavelength selection device;

FIGS. 6A and 6B illustrate an example of an optical component havingembedded waveguides in accordance with an example herein, and for use ina ball grid array application;

FIG. 7 illustrates another example of an optical component in a ballgrid array application, but with embedded waveguides in a support fortwo substrates, and

FIG. 8 illustrates a detailed view of an example of a substrate that maybe used in the example of FIG. 7.

DETAILED DESCRIPTION OF AN EXAMPLE

Example embodiments described herein provide laser apparatuses andmethods that use thermo-optic adjustment of an external laser cavity toprovide wavelength stability and wavelength, i.e., frequency, tuning.The laser apparatuses may include a gain medium coupled to a platform,that gain medium having an emitting facet for emitting a first lightbeam toward the external laser cavity. The external laser cavity mayhave a wavelength selection device for wavelength tuning, for example,the channel wavelength in a DWDM system. The wavelength selection devicemay comprise an optical tuning element, including for example one ormore etalons, gratings, prisms, filters or like devices, or variouscombinations thereof. The element may be thermally tunable to providewavelength selective feedback to the gain medium. The element is coupledto a support that is mounted to the platform.

The support may be formed of a material having sufficient mechanicalstrength to allow the support to be mounted to the platform usingoptoelectronic device manufacturing techniques, such as pick-and-placeassembly. For example, the support may be formed of a liquid crystalpolymer (LCP). LCPs have the added advantage that their coefficients ofthermal expansion (CTE) can be adjusted over a range of values. Thus, anLCP-material can be matched in CTE to the CTE of the platform upon whichthe support is mounted, as well as to the CTE of the tuning elementsmounted. As discussed further below, using LCP in a support or carrierallows that support to be formed with embedded electrodes that couple tothe tuning element and controller. These embedded electrodes may beeasily formed within the support, and thus electrically isolated fromother components.

Although, various techniques are described in reference to particularillustrated examples, the descriptions are not limited to theseexamples. Further, while drawings are provided for illustrationpurposes, it is noted that the apparatuses may vary as to configurationand as to details of the parts, and that the methods may vary as todetails and the order of events, without departing from the basicconcepts as disclosed herein. Furthermore, although examples aredisclosed primarily in an external cavity laser, the examples are notlimited thereto. Further, any definitions herein are provided for reasonof clarity, and should not be considered as limiting, and any technicaland scientific terms used herein are intended to have the same meaningas commonly understood by those skilled in the art. It should also beunderstood that the terminology used herein is for the purpose ofdescribing particular embodiments only, and is not intended to belimiting.

FIG. 1 shows a laser apparatus 110 capable of thermo-optic tuning. Theapparatus 110 includes a laser device 111 with gain medium 112, and areflective element 114 (e.g., an end mirror) both coupled to a thermallyconductive base, or platform 116. The gain medium 112 may comprise, forexample, a conventional Fabry-Perot diode emitter chip with ananti-reflection (AR) coated first facet (not shown) and a partiallyreflective second facet 120. The reflective element 114 though describedas a mirror may comprise a mirror, grating, prism or other reflector orretroreflector. In the illustrated configuration, the external lasercavity extends from the first facet to the reflective element 114, andhas an optical path length. Gain medium 112 emits a light beam from itsfirst facet (closest to the reflective element 114) which is collimatedby a lens 122 to define an optical path. The beam is reflected from endreflective element 114 and returned along the optical path to gainmedium 112 by the lens 122.

A wavelength selection device 125 is positioned in the optical path tofeed back light to the gain medium 112 at a selected wavelength therebytuning the device. The reflective element 114 may be curved in certainembodiments such that lens 122 may be omitted. Other alternatives willbe apparent to persons skilled in the art, including for example the useof a toric lens system or other optical element(s) capable of re-imagingthe returning beam onto the first facet, so that gain medium 112receives feedback from the external cavity, in place of lens 122.

The wavelength selection device 125 is mounted to the platform 116,which itself is coupled to a thermoelectric controller (TEC) 126 thatcontrols the temperature of the entire platform 116 via thermalconduction. The TEC 126 therefore may control the temperature of theplatform 116 for adjusting the optical path length of the laserapparatus 110 and thereby tuning the components of the apparatus 110.The wavelength selection device 125 may be tunable such that theapparatus 110 has a single transmission peak within a wavelength rangeof interest such as, for example, the gain bandwidth of gain medium 124,the wavelength range of the ITU (International Telecommunications Union)“C” band (approximately 192.1 THz to approximately 196.1 THz orapproximately 1525 to approximately 1565 nanometers), or otherwavelength range.

The thermally conductive platform 116 may be made from any thermallyconductive material, examples of which include various metals, metalnitrides, carbides and oxides, or alloys, blends, mixtures or compositesthereof, which provide materials with good thermal conductivity andrelatively low CTE. Aluminum nitride (AIN) may be used as the platformmaterial in certain embodiments. The material of platform 116 may beselected to have a particular CTE that allows CTE matching to componentsmounted thereto. In some embodiments, platform 116 may comprise a highCTE material, such as aluminum, copper, zinc or other metal or metalalloy, so that a desired amount of physical expansion and contractionaccording to temperature control of the TEC 126 may occur. A controllernot shown may control operation of the TEC 126. The platform 116 may incertain embodiments be made of silicon, allowing CTE matching to siliconcomponents such as thermally tuned etalons. The use of silicon forplatform 116 also allows for the integration of conductor paths directlyonto the platform 116, and formation of specific geometries on platform116 using conventional silicon machining and fabrication techniques.

The gain medium 112 may be thermally coupled to platform 116 such thatthermoelectric controller 126 can control the temperature of gain medium112 by thermal conduction through the platform 116. “Thermal coupling”as used herein means any mounting or coupling arrangement orconfiguration that provides effective heat flow for thermal control ofthermally coupled components. Gain medium 112, for example, may bemounted on a thermally conductive carrier 128 that is coupled toplatform 116, where the carrier 128 comprises a thermally conductivematerial such as a metal, metal oxide, metal nitride, metal carbide, oralloys, blends, mixtures or composites thereof. In other examples, thecarrier 128 may comprises aluminum nitride, silicon carbide, or asilicon carbide blend (alloy). In yet other examples, carrier 128 maycomprise a copper tungsten (CuW) alloy. Further still, the platform 116and carrier 128 may be matched in CTE to each other and to gain medium112. Thermally conductive adhesives or solders may be used to mount gainmedium 112 onto carrier 128, and to mount carrier 128 and/or othervarious structures onto the platform 116.

The reflective element 114 may also be mounted on platform 116 as notedabove and may, in certain embodiments, be thermally coupled to platform116 using thermally conductive adhesives, solders and/or carriers orsupports.

The wavelength selection device 125 is a conventional device. As shownin FIG. 2, the wavelength selection device 125 includes two opticalelements in the form of etalons 202 and 204 mounted to a carrier 206that is mounted directly to the TEC controllable platform 116.

The device 125 is formed of Invar™, a hardened Ni—Fe alloy. The etalons202 and 204 are active in the illustrated example, having electrodes forheating and electrodes for temperature monitoring. To control theseelectrodes, a flex circuit 208 is used with a proximal end 210 adjacentthe etalons 202 and 204 and a distal end 212. The end 210 has aplurality of exposed vertically, extending bond pads 214 for coupling tothe etalon 202 (where similar wire bonds for the etalon 204 are hiddenfrom view and not shown). The distal end 212 includes horizontal wirebond pads 216 for coupling to a controller. These orientations aregeneral in nature, but an advantage to having a horizontal flex circuitmounting at least over a portion of the flex circuit 208 is that apick-and-place manufacturing processes may be used to affixed wiresthereto.

The carrier 206 has a mounting end 218 when the etalons 202 and 204 aremounted, the mounting end have a recessed mounting face 220 (only onebeing visible). A flex circuit platform 222 extends outwardly from themounting face 220 and supports the proximal end 210 of the flex circuit208. This platform 222 extends vertically, in the illustrated example,and is thermally coupled to a horizontally-extending platform 224 thatsupports the distal end 212.

The flex circuit of the conventional device in FIG. 2 is external to thecarrier 206, adding to fabrication time and complexity, as well asadding a manufacturing step, that of mounting the flex circuit to thesupport. FIG. 3 illustrates an example wavelength selection device 300in accordance with a present example. The device 300 does include twoetalons 302 and 304, both of which are mountable to a carrier 306.Etalon 302 is shown prior to mounting to illustrate details of thecarrier 306. In the illustrated example, the carrier 306 includes amounting surface 308 upon which the first etalon 302 may be mounted(with a similar mounting surface for the etalon 304). The mountingsurface 308 may be tilted from normal such that the etalon 302 tilts 1°to 2° inward, toward fiducial 310 for tilting the etalon 302 in thepitch direction to reduce surface reflection, as will be known topersons skilled in the art. An optical cavity 312 is formed extendingfrom the surface 308 to the opposing mounting surface, which may also betilted toward fiducial 310. The laser beam travels through this opticalcavity 312.

The etalon 302 is an active tuning element with electrodes forthermo-optic tuning. In the illustrated example, heating electrodes 314extend from an edge 316 of etalon 302 to define a heater centered aroundan optical transmission region 318. Electrodes 320 extend from the edge316 to region 318 as well, but to form a monitoring element, e.g., aresistive thermal device (RTD), used in feedback loop control oftemperature tuning.

To connect to these electrodes, the support 306 includes a series ofembedded electrodes, which in the illustrated example are embedded belowthe outer surface of the substrate 306. Embedded electrodes 322 extendfrom a first bond pad 324 to a second bond pad 326. The bond pad 324 isformed on an outer surface of a platform 325 that extends outwardly fromthe mounting surface 308. The bond pad 324 may be used to couple theelectrodes 322 to the heater electrodes 314, while the bond pad 328 maybe used to couple to a controller. Similarly, embedded electrodes 328extend from the pad 324 to the pad 326 and are coupled to the monitoringelectrodes 320.

The pads 324 and 326 are wire bond pads, in the illustrated example, forconnecting wire bonds between pad electrodes and the etalon. Althoughelectrodes are described for coupling to etalon 302, it will beappreciated that the support 306 would have additional electrodes forcoupling to the etalon 304, in a similar manner. By embedding theelectrodes 322 and 328 within the support 306, greater electricalisolation may be achieved along with faster and more accuratefabrication times. Further, the flex circuit mounting step has beenremoved.

The embedded electrodes 322 and 328 extend in three dimensions, in theillustrated example, which cain allow for a support having a complexstructure shape. A support can be formed to support and provideelectrical leads to other structures, such as dither optical path lengthadjusters or the laser gain medium itself. A single bonding pad could beused to couple to a controller, while embedded electrodes would extendfrom the bonding pad to the other element(s).

The etalon materials used in certain embodiments have temperaturedependent refractive indices as well as coefficients of thermalexpansion such that thermo-optic tuning may involve simultaneous thermalcontrol of etalon material refractive index as well as thermal controlof etalon physical thickness by selective heating or cooling.Semiconductor materials such as silicon and gallium arsenide provide alarge change in refractive index with temperature and may be used forthe material etalons for effective thermo-optic tuning. In someexamples, the etalons 302, 304 may comprise silicon, which istransparent over the gain bandwidth or output wavelength range ofInGaAs, InGaAsP and other gain media. Other materials include liquidcrystal polymers (LCPs), or materials formed of inert, no-hydroscopicmaterials. The etalons 302, 304 may be affixed to the substrate 306 byany epoxy, solder, or other adhesive.

FIG. 4 shows another example of a support with embedded electrodes.Support 400 is similar to support 300 having a mounting surface 402 fromwhich an optical cavity 404 extends. The support 400, however, haselectrodes embedded for direct contact with the etalon 302 on themounting surface 402. An etalon pad 406 is positioned on the surface 402at an edge 408 that coincides with the edge 316 of the etalon 302. Thus,the etalon 302 may be directly mounted on the mounting surface 402making direct electrical contact with the pad 406. Embedded electrodes408 extend from a pad 410 to electrode pad 412 that form a directelectrical connection with the electrodes 314 of the etalon 302.Embedded electrodes 414 are coupled to electrode pads 416 that form adirect electrical connection with the electrodes 320 of the etalon 302.Thus, the extra fabrication step of wire bonding on the optical tuningelement may be eliminated.

To provide them with embedded electrodes, the carriers 306 and 400 maybe formed of a liquid crystal polymer (LCP) material. LCP materials hayemolecules that can be organized in crystalline lattice structure form,but that can also be poured into a casting or mold in a liquid state,prior to crystallization. As crystalline structures, LCP materials offermechanical stability and accurate edges and dimensions duringmanufacturing. LCP materials have low moisture absorption (typically,<0.04% weight) and in general are not susceptible to atmosphericconditions. Thus, they may be used in environments of variousatmospheric compositions and pressures. LCP materials also have theadvantage that their CTEs are adjustable over a range of values. Assuch, the thermal responsiveness of tuning element carriers can betailored to match that of the particular mounting platform in the laserapparatus. Typical platform materials include copper, which has a CTE ofapproximately 17 PPM/° K, or glass, ceramic, Kovar™ (an iron alloy)which have CTEs around approximately 7 PPM/° K. LCP can be tailored tohave a CTE of any where from 0-30 PPM/° K or higher by using differentmonomers in forming the LCP and by using different formation processconditions. This flexibility allows the carrier to be formed of amaterial having a CTE that matches the CTE of the optical tuning elementas well. An LCP carrier can be formed to have CTEs over any desiredrange, including below 10 PPM/° K, below 20 PPM/° K, and above 30 PPM/°K.

Carriers may be formed of LCP via injection molding of a liquid stateLCP into a casting where electrodes are pre-positioned using afeedthrough in the casting. Embedding of the electrodes, whethersubsurface or on surface may be achieved through the use ofpre-positioned electrodes or via insertion during the LCP moldingprocess. Plating techniques may be used as well to form electrodes onpatterned recesses on the outer surface of the molding.

FIGS. 3 and 4 show carriers that extend coplanarly with the opticaltuning element, e.g., vertically extending. This disclosure is notlimited to a particular configuration, however. Wavelength selectiondevices may include horizontal planar supports with embedded electrodesdefining heating and monitoring regions for optical tuning elementsextending vertically from the support. For example, a wavelengthselection element 500 having a substrate 502 and two etalons 504, 506extending from an upper surface 508 thereof is shown in FIGS. 5A and 5B.The substrate 502 has embedded monitoring electrodes 510 that extendthree-dimensionally through the substrate 502. In this exampleillustration, the electrodes 510 extend from a monitoring region at theetalon 504 to wire bond pads 512 on the upper surface 508 for couplingto a controller. Similarly, electrodes 514 extend from a heating regionaround the etalon 504 to a wire bond pad 520. Each of the etalons 504and 506 is mounted in a separate thermally responsive region 522, 524respectively. These regions 522, 524 are thermally isolated by a thermalbarrier 526 to allow for independent thermo-optic tuning of each. FIG.5B shows a front view of the device 500 showing internal features of theelectrodes 510, 518 and the etalon 504 to show that electrodes can beformed extending in three dimensions through a monolithic or singlesubstrate, with out limiting these electrodes to particular planarfabrication lasers, as is done with substrates formed by typicalsemiconductor processing techniques. By using LCP for the substrate 502,embedded electrodes can be formed without limitation to shape, position,depth or thickness.

FIG. 6A illustrates yet another example, a flip-chip mountable opticaldevice 600 that is a wavelength selection device, in the illustratedexample. The device 600 includes two optical filters 602 and 604 eachmounted in a substrate 604 that may be formed of a LCP or othermaterial. The substrate 604 includes embedded electrodes (each generallyreferenced as electrode 606). In the illustrated example, each electrode606 is coupled to a ball of a ball grid array (BGA) 608 that may beformed on an undersurface of the substrate 604, for example at locationscoinciding with via holes extending through the substrate 604 forengaging the electrodes 606. The substrate 604 may be a single LCPmaterial with embedded electrodes 606 or it may represent a multilayeredstructure, e.g., having different LCP layers and having differentelectrodes (e.g., heating electrodes and temperature monitoringelectrodes) in the different layers. The BGA 608 may be formed of knownBGA conductor materials and may be patterned for marrying with amounting substrate.

In the example of FIG. 6A, the substrate 604 of the device 600 containselectrodes for controlling the thermal control. As such the substrate604 may be formed of LCP, for example. FIG. 6B shows a wire frame 609extending downward from one of the filters 602 to the substrate 604.

FIG. 7 illustrates another example implementation-of a flip-chip device700. The device 700 includes two tuning filters 702, 704, e.g., etalons,each mounted on a separate substrates 706, 708 respectively. Substrate706 includes a BGA 710 for electrically coupling the substrate 706 to anintegrated support 712. In the illustrated example, the support 712 maybe formed of a LCP and include embedded electrodes 714 for coupling thesupport for heating, monitoring, and any other desired uses. Thesubstrate 708 includes a BGA 716 for coupling the substrate 708 tointegrated support 712 and more particularly embedded electrodes 718 ofthe support 712.

FIG. 8 illustrates an example of the substrate 706, showing heatingelectrodes 720 and four monitoring electrodes 722. The electrodes 720and 722 surround a mounting region for the filter 702. The substrate 706may be a Silicon substrate for example, and the electrodes 720 and 722embedded electrode traces coupled to the BGA 710. Substrate 708 wouldhave a similar configuration. The BGAs of each substrate couple toelectrodes on the support 712 for coupling to controller for the laserapparatus, e.g., a wavelength selection device controller.

Various examples above describe Fabry-Perot etalons, which may compriseparallel plate solid, liquid or gas spaced etalons, and which may betuned by precise dimensioning of the optical thickness or path length.Etalons are illustrated by way of example. Fewer, additional and/orother optical elements may be used in the wavelength selection device,such as for example, gratings, prisms, thin film interference filters,or other tunable elements.

In the illustrated examples, the etalons are thermo-optically tunable,where the term “thermo-optic” tuning means tuning by temperature-inducedchange in etalon material refractive index, temperature induced changein the physical thickness of an etalon, or both. Various tuningmechanisms involving various techniques may be used, however, includingthermo-optic, electro-optic, acousto-optic, piezo-optic, mechanical, orother tuning to vary refractive index of etalon material and/or vary thespacing of etalonfaces.

Although certain apparatus constructed in accordance with the teachingsof the invention have been described herein, the scope of coverage ofthis patent is not limited thereto. On the contrary, this patent coversall embodiments of the teachings of the invention fairly falling withinthe scope of the appended claims either literally or under the doctrineof equivalence.

1. A laser apparatus comprising: a platform; a gain medium coupled tothe platform, the gain medium having a first output facet and a secondoutput facet to emit a light beam from in response to an electricalinput; a reflector positioned to reflect the light beam and coupled tothe platform, the reflector and the first output facet defining a lasercavity having an optical path length; and an electrically controllablewavelength selection device disposed within the laser cavity, theelectrically controllable wavelength selection device having a tunableoptical element mounted to a support coupled to the platform, whereinthe support includes a liquid crystal polymer and at least one embeddedelectrode for electrically controlling the wavelength selection device.2. The laser apparatus of claim 1, wherein the coefficient of thermalexpansion for the platform is substantially the same as the coefficientof thermal expansion for the support.
 3. The laser apparatus of claim 1,wherein the support has a surface for mounting of the tunable opticalelement and a first platform for connecting the at least one embeddedelectrode to external circuitry.
 4. The laser apparatus of claim 3,wherein the at least one embedded electrode extends from a secondplatform adjacent the surface to the first platform.
 5. The laserapparatus of claim 3, wherein the at least one embedded electrode iscoupled to a contact on the surface.
 6. The laser apparatus of claim 1,wherein the tunable optical element comprises a first etalon and asecond etalon.
 7. The laser apparatus of claim 6, wherein each of thefirst etalon and the second etalon have a heating electrode assembly anda monitoring electrode assembly, the at least one embedded electrodecomprising at least one first heating electrode for coupling to theheating electrode assembly of the first etalon, at least one secondheating electrode for coupling to the heating electrode assembly of thesecond etalon, at least one first monitoring electrode for coupling tothe monitoring electrode assembly of the first etalon, and at least onesecond monitoring electrode for coupling to the monitoring electrodeassembly of the second etalon.
 8. The laser apparatus of claim 1,wherein the coefficient of thermal expansion is less than 10 PPM/° C. 9.The laser apparatus of claim 1, wherein the coefficient of thermalexpansion is less than 20 PPM/° C.
 10. The laser apparatus of claim 1,wherein the coefficient of thermal expansion is greater than 30 PPM/° C.11. An optical filter support for mounting to a tunable optical elementhaving at least one control electrode, the optical filter supportcomprising: a mounting surface for the tunable optical element; a firstcontact pad positioned to couple to the at least one control electrode;a second contact pad positioned to couple to an external circuit; and anembedded electrode extending within the support from the first contactpad to the second contact pad, where the optical filter supportcomprises a liquid crystal polymer.
 12. The optical filter support ofclaim 11, wherein the first contact is on the mounting surface.
 13. Theoptical filter support of claim 11, wherein the embedded electrode isembedded within the support.
 14. The optical filter support of claim 11,wherein the liquid crystal polymer has a coefficient of thermalexpansion that matches a coefficient of thermal expansion of the tuningelement.
 15. A method of manufacturing an optical filter support for atunable optical element having at least one control electrode, themethod comprising: forming a support having a mounting surface, wherethe support comprises a liquid crystal polymer; forming a first contactpad on the support to couple to the at least one control electrode;forming a second contact pad on the support to couple to an externalcircuit; and embedding at least one electrode within the support andextending from the first contact pad on the second contact pad.
 16. Themethod of claim 15, further comprising: forming the first contact pad onthe mounting surface; and directly coupling the at least one electrodeto the contact pad.
 17. The method of claim 15, further comprisingcoupling the first contact pad to the at least one control electrodeusing a wire bond.
 18. The method of claim 15, wherein the liquidcrystal polymer has a coefficient of thermal expansion that matches acoefficient of thermal expansion of a thermoelectric controllerthermally coupled to the support.
 19. The method of claim 15, furthercomprising embedding the at least one electrode to extend withinthree-dimensions in the support between the first contact pad and thesecond contact pad.